JPH0738305Y2 - 真空吸着プレート - Google Patents
真空吸着プレートInfo
- Publication number
- JPH0738305Y2 JPH0738305Y2 JP7200788U JP7200788U JPH0738305Y2 JP H0738305 Y2 JPH0738305 Y2 JP H0738305Y2 JP 7200788 U JP7200788 U JP 7200788U JP 7200788 U JP7200788 U JP 7200788U JP H0738305 Y2 JPH0738305 Y2 JP H0738305Y2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- suction plate
- plate
- vacuum suction
- exhaust path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003746 surface roughness Effects 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Load-Engaging Elements For Cranes (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7200788U JPH0738305Y2 (ja) | 1988-05-31 | 1988-05-31 | 真空吸着プレート |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7200788U JPH0738305Y2 (ja) | 1988-05-31 | 1988-05-31 | 真空吸着プレート |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01174385U JPH01174385U (en]) | 1989-12-12 |
| JPH0738305Y2 true JPH0738305Y2 (ja) | 1995-08-30 |
Family
ID=31297185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7200788U Expired - Lifetime JPH0738305Y2 (ja) | 1988-05-31 | 1988-05-31 | 真空吸着プレート |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0738305Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2569175Y2 (ja) * | 1991-08-31 | 1998-04-22 | 山形日本電気株式会社 | ベローズ形ウェーハ真空チャック |
| KR102556368B1 (ko) * | 2020-10-30 | 2023-07-18 | 세메스 주식회사 | 반송 핸드 및 기판 처리 장치 |
-
1988
- 1988-05-31 JP JP7200788U patent/JPH0738305Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01174385U (en]) | 1989-12-12 |
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